Download e-book for kindle: A Guide to Hands-on MEMS Design and Prototyping by Kubby

By Kubby

ISBN-10: 0521889251

ISBN-13: 9780521889254

ISBN-10: 1107645794

ISBN-13: 9781107645790

no matter if you're a scholar taking an introductory MEMS path or a working towards engineer who must wake up to hurry fast on MEMS layout, this functional advisor offers the hands-on adventure had to layout, fabricate and attempt MEMS units. you'll find out how to use foundry multi-project fabrication tactics for reasonably cheap MEMS initiatives, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. various layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and trying out MEMS units, in addition to workouts and layout demanding situations on the finish of each bankruptcy. strategies to the layout problem difficulties are supplied online.

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A Guide to Hands-on MEMS Design and Prototyping by Kubby

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